A Python-based tool for modeling optical photolithography

Maskless photolithography system targeting 5um resolution. Open hardware design.

Desktop app for lithography learning available for Windows, macOS, and Linux

Lithography simulator

repo for the website of neural litho project

PolyHatch is an AutoCAD script written in lisp language to automate a basic photolithography photomask verification. The purpose of this scrip is to look for closed polylines within a given selection of drawings in a list of layers and hatch them.

High performance jax-based photolithography simulation.

Basic parameteric shapes to facilitate mask design in CleWin

Optical Proximity Correction (OPC) is a photolithography technique that modifies photomask geometry to counteract diffraction and process effects, ensuring accurate printing of patterns on the wafer. This work demonstrates a proof of concept showing how using a GPU-based approach can significantly speed up these modifications compared to a CPU.

Level 3 Design, light diffusion modelling

Photolithographic mask visualization and automatic microelectrode array design

A plugin for KLayout that generates a machine-readable barcode for GCA optical steppers.